• EtherCAT

Communication Module SPI - EtherCAT Slave

The module for the semiconductor manufacturing equipment market

Product Image

COMX 51CA-RE-R-Image



At a glance

  • EtherCAT Slave Network interface for semiconductor manufacturing equipment devices
  • Developed according to the ETG.5003-1 standard, the Common Device Profile
  • Complete slave interface with network connector onboard
  • Host connection via dual-port memory or SPI
  • Firmware update via integrated web server

Weitere Informationen


The comX 51CA-RE\R communication module for EtherCAT Slave has been designed to be integrated into automation devices for semiconductor manufacturing equipment. Devices such as mass flow controllers or vacuum valves can thus be equipped with a network interface according to the ETG.5003-1 standard.

In the SEMI (Semiconductor Equipment and Materials International) market, the EtherCAT standard is enjoying increasing popularity. Accordingly, large semiconductor suppliers actively participating in the development of the EtherCAT standard ETG.5003 the Semiconductor Device Profile.

The comX 51CA-RE\R is in line with the ETG standardwith addressing the Explicit Device ID via rotary switches, which was defined in the Common Device Profile (CDP, ETG.5003-1).

Ordering information

Product namePart numberBrief description
COMX 51CA-RE\R/ECS V41571.101/ECSV4Communication Module SPI - EtherCAT Slave


Product namePart numberBrief description
COMXEB1530.000comX Evaluation Board




The comX communication module is a universal solution for upgrading devices with master or slave functionality. All modules are pin-compatible and have an identical software interface.
There are designs with an integrated network connector and designs in which the network interface is tied to the base board.

Brochures, Whitepaper and Case Studies

Find all our current Media to Embedded Modules at our Media Archive.