COMX 51CA-RE\R/ECS
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Communication module for the semiconductor industry

The module for the semiconductor manufacturing equipment market
  • EtherCAT Slave network interface for devices of the semiconductor manufacturing equipment

  • Developed according to standard ETG.5003-1, the Common Device Profile

  • Complete slave interface with network connector onboard

  • Host connection via dual-port memory or SPI

  • Firmware update via integrated web server

The comX 51CA-RE\R communication module for EtherCAT Slave has been designed to be integrated into automation devices for semiconductor manufacturing equipment to provide mass flow controllers, vacuum valves, etc. with a network interface according to the ETG.5003-1 standard.

In the SEMI (Semiconductor Equipment and Materials International) market, the EtherCAT standard is becoming increasingly popular. Accordingly, large semiconductor suppliers have made it their task to actively participate in the development of the EtherCAT standard ETG.5003, the “Semiconductor Device Profile”.

The device profile (Common Device Profile - CDP, ETG.5003-1) defines the addressing by means of "Explicit Device ID", which can be set by the rotary switch on comX 51CA-RE\R.

Product name

Part number

Brief description

COMX 51CA-RE\R/ECS V4

1571.101/ECSV4

Communication module for the semiconductor industry