Shorter time to market for semiconductor device manufacturers with comX communication module

Hilscher offers compliance, compatibility and reliability for EtherCAT-based automation devices used in semiconductor manufacturing equipment with its highly capable communications module comX 51CA-RE\R. The multiprotocol-capable embedded module comX is constantly improved by Hilscher in order to meet the continuously developing industry standards for industrial communication in the chip industry.

Optimized for semiconductor manufacturing, this module for EtherCAT Slave applications streamlines automated device integration and meets the ETG.5003.1 standard for Common Device Profile (CDP). It is an upgrade to our standard comX module and allows devices like lasers, mass flow controllers and vacuum valves to be easily equipped with a network interface.

A key enabling feature of the comX 51CA-RE\R is the addition of three hexadecimal rotary switches, which allow the module to address devices via an ETG.5003.1-required Explicit Device ID. Meeting this requirement brings devices equipped with the comX 51CA-RE\R additional benefits like hot-connect and cable misconnection avoidance.